LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing

Lithography orchestrates a symphony of light, mask and photochemicals to transfer the integrated circuit patterns onto the wafer. Lithography simulation serves as the critical nexus between circuit design and manufacturing, where its speed and accuracy fundamentally govern the optimization quality of downstream resolution enhancement techniques (RET). While machine learning promises to circumvent computational limitations of lithography process through data-driven or physics-informed approximations of computational lithography, existing simulators suffer from inadequate lithographic awareness due to insufficient training data capturing essential process variations and mask correction rules. We present LithoSim, the most comprehensive lithography simulation benchmark to date, featuring over $4$ million high-resolution input-output pairs with rigorous physical correspondence. The dataset systematically incorporates alterable optical source distributions, metal and via mask topologies with optical proximity correction (OPC) variants, and process windows reflecting fab-realistic variations. By integrating domain-specific metrics spanning AI performance and lithographic fidelity, LithoSim establishes a unified evaluation framework for data-driven and physics-informed computational lithography. The data (https://huggingface.co/datasets/grandiflorum/LithoSim), code (https://dw-hongquan.github.io/LithoSim), and pre-trained models (https://huggingface.co/grandiflorum/LithoSim) are released openly to support the development of hybrid ML-based and high-fidelity lithography simulation for the benefit of semiconductor manufacturing.